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TechnicalSpecifications

Printing technology：

Two-Photon Grayscale Lithography (2GL)

Minimum XY feature size：

160 nm typical; 200 nm specified*

Finest XY resolution：

400 nm typical; 500 nm specified*

Finest vertical steps：

10 nm， quasi-continuous topographies possible

Minimum surface roughness Ra：

≤ 10 nm*

Scan speed：

≤ 250 mm/s*

Area printing speed：

3 mm2/h typical for diffractive optical elements